See Figure 4-6. Agilent B2200 User’s Guide, Edition 4 4-21 Programming Capacitance Compensation In Figure 4-6, C2H, C2L, C3H, C3L are the compensation coefficients defined in the compensation data file. where, CxH is for the path connected to the Agilent 4284A Hc-Hp terminal, and CxL is for the path connected to the Agilent 4284A Lc-Lp terminal. When the Agilent B2220A probe card interface is used, obtain the coefficients for C3x, and create your compensation data file. In this case, probe card will be used for the C3x path. When the connector plate is used, obtain the coefficients for C2x and C3x, and create your compensation data file. In this case, triaxial cable with connector plate will be used for the C2x path. And coaxial cable with positioner will be used for the C3x path. For obtaining the compensation coefficients and creating the compensation data file, see “To Create Compensation Data File” on page 4-23. Figure 4-6 Extension Cables and Compensation Coefficients Agilent 4284A with option 006 _ , .... ... Perform open calibration at this plane. Short calibration is optional._ Agilent 16494F or 16048 High C2H. C3H: for CMH path C2L. C3L: for CML path Agilent B2220A (C2H/C2L, fixed) f \ |Case 1. Probe card interface | X <= => \ [ □ 1 u □ □ ao □ □□ □ □ □ □ a Agilent 16494A/C (Cl, fixed) 1 o o o o o o Probe card etc. (C3H/C3L, need update) Case 2. Connector plate Agilent B2200A with B2210A or Agilent B2201A with B2211A Agilent 16494A/B (Cl,fixed) ooooooo ooooooo L B2210A outputs or B2211A outputs Agilent 16495F/G ■-Extended triaxial cables with connector plate (C2H/C2L, need update) Extended coaxial cables and positioners (C3H/C3L. need update) 4-22 Agilent B2200 User’s Guide, Edition 4 Programming Capacitance Compensation To Create Compensation Data File This section explains how to create the compensation data file. 1. Select one of the compensation data files (template, 20 files) installed when the Agilent B2200 VXIplug&play driver is installed. To select the most appropriate template for your measurement environment, see Table 4-9 that lists the file name and the measurement environment where the template targets. Each template is a text file that contains the information as shown below. # # Compensation data file for B2 210A/Probecard I/F/3m triax cable # # # MB Mother Board # MH Matrix Path High # ML Matrix Path Low # C1 Agilent Triax Cable # C2H Probe card I/F or User Triax cable High # C2L Probe card I/F or User Triax cable Low # C3H Probe card or User Coax cable High # C3L Probe card or User Coax cable Low # format version 1.0 B2210A PCIF # # & R[Ohm] L H] C F] # MB 0 .000000e+00 5 250000e- 08 2 940000e -11 MH 2 .430000e+00 6 310000e- 07 1 930000e -10 ML 2 .4 90000e+00 5 970000e- 07 1 920000e -10 C1 6 .300000e-01 1 250000e- 06 1 600000e -10 C2H 2 .98 8 000e-01 5 090000e- 07 7 000000e -11 C2L 2 .98 8 000e-01 5 090000e- 07 7 000000e -11 C3H 0 .000000e+00 8 000000e- 08 1 500000e -13 C3L 0 .000000e+00 8 000000e- 08 1 500000e -13 The 15th line specifies the used switch module, B2210A or B2211A. The 16th line specifies the DUT interface, PCIF or CABLE. PCIF indicates that the Agilent B2220A probe card interface is used. CABLE indicates that the connector plate is used. The lines C2H to C3L should be modified for each measurement environment. See Table 4-9 and Table 4-10. Do not modify the other lines. Agilent B2200 User’s Guide, Edition 4 4-23 Programming Capacitance Compensation Table 4-9 Template Compensation Data Files File namea Measurement environment that template targets Switch module Cableb DUT interfacec Coefficients to be modified \B2210A\pcif\triax\3m.data B2210A 16494A-002 B2220A C3H and C3L \B2210A\pcif\triax\4m.data 16494A-005 \B2210A\pcif\kelvin\3m.data 16494C-002 \B2210A\pcif\kelvin\4m.data 16494C-005 \B2210A\cable\triax\1_5m.data 16494A-001 16495F/G C2H, C2L, C3H, and C3L \B2210A\cable\triax\3m.data 16494A-002 \B2210A\cable\triax\4m.data 16494A-005 \B2210A\cable\kelvin\1_5m.data 16494B-001 \B2210A\cable\kelvin\3m.data 16494B-002 \B2210A\cable\kelvin\4m.data 16494C-005 \B2211A\pcif\triax\3m.data B2211A 16494A-002 B2220A C3H and C3L \B2211A\pcif\triax\4m.data 16494A-005 \B2211A\pcif\kelvin\3m.data 16494C-002 \B2211A\pcif\kelvin\4m.data 16494C-005 \B2211A\cable\triax\1_5m.data 16494A-001 16495F/G C2H, C2L, C3H, and C3L \B2211A\cable\triax\3m.data 16494A-002 \B2211A\cable\triax\4m.data 16494A-005 \B2211A\cable\kelvin\1_5m.data 16494B-001 \B2211A\cable\kelvin\3m.data 16494B-002 \B2211A\cable\kelvin\4m.data 16494C-005 a. : driver_install_folder\AGB220XA\ccdata (e.g. C:\temp\AGB220XA\ccdata) b. Model number of the cable connected between the switch module and the DUT interface. c. Agilent B2220...
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