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Фрагмент инструкции
However, Helix Technology Corporation, cannot accept any financial or other responsibilities that may result from the use of this information. No warranties are granted or extended by this document. Helix Technology Corporation reserves the right to change any or all information contained herein without prior written notice. Revisions may be issued at the time of such changes and/or deletions. Any duplication of this manual or any of its parts without expressed written permission from Helix Technology Corporation is strictly prohibited. Any correspondence regarding this document should be forwarded to: Helix Technology Corporation Mansfield Corporate Center Nine Hampshire Street Mansfield, Massachusetts 02048-9171 U.S.A. Telephone: (508) 337-5000 FAX: (508) 337-5464 The following Helix Technology Corporation trademarks and service marks may appear in this document: Conductron® Convectron® Cryodyne® Cryogem® Cryogenerator® Cryo-Torr® CTI-Cryogenics® FastRegen™ GOLDLink® Granville-Phillips® GUTS® Helix® Helix Technology.. Your Vacuum ConnectionSM Micro-Ion® Mini-Convectron® Mini-Ion™ On-Board® RetroEase® RetroFast® Stabil-1® Stabil-Ion® ThinLine™ TurboPlus® TrueBlueSM Vacuum AssuranceSM All other trademarks or registered trademarks are the property of their respective holders. ©2004 Helix Technology Corporation Printed in USA 9600 Compressor Installation, Operation, and Maintenance Table of Contents Section 1 -9600 Compressor Description General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-1 Benefits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-1 Compressor Configurations ...................... . . . . . . . . . . . . . . . . . . . . . 1-1 System Documentation . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-2 CTI-CRYOGENICS Helium Refrigeration System ... . . . . . . . . . . . . . . . . . . . . . 1-2 Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-4 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-4 Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-5 Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-5 Cooling Water . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-6 General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-7 Component Description . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-8 System CircuitBreaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 ControlCircuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 PowerONIndicator . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-9 Gas Charge Flared Fitting .................... . . . . . . . . . . . . . . . . . . . . . 1-9 Helium PressureGauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9 PowerInlet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 1-9 Return Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . ..................... 1-10 Cooling WaterIN. . . . . . . . . . . . . . . . . . . . . . . . . . ..................... 1-10 Cooling WaterOUT. . . . . . . . . . . . . . . . . . . . . . . . ..................... 1-10 Cryopump Electrical Outlet . . . . . . . . . . . . . . . . . . ..................... 1-10 Cryopump PowerPhase Switch ................ . . . . . . . . . . . . . . . . . . . . 1-11 Compressor Remote Connector ................ . . . . . . . . . . . . . . . . . . . . 1-11 Supply Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . ..................... 1-11 Multiple On-Board Cryopump Connections ......... . . . . . . . . . . . . . . . . . . . . 1-11 Multiple Cryo-TorrCryopump Connections ......... . . . . . . . . . . . . . . . . . . . . 1-13 Section 2 - Unpacking and Inspection Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 2-1 ShippingCarton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 Removal fromShippingCarton................... . . . . . . . . . . . . . . . . . . . . . 2-1 CompressorInspection . . . . . . . . . . . . . . . . . . . . . . . . ...................... 2-2 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ...................... 2-2 HeliumStatic PressureVerification ............ . . . . . . . . . . . . . . . . . . . . . 2-2 Shipping CartonContents .................... . . . . . . . . . . . . . . . . . . . . . 2-2 P/N 8040540 9600 Compressor Installation, Operation, and Maintenance Table of Contents (continued) Section 3 - Installation Introduction . . . . . . . . . . . ....